U.S. Opens R&D Center For EUV Lithography
The R&D center, called the EUV Accelerator, will focus on current and future EUV technologies
By Mark LaPedus
Natcast, a U.S.-based non-profit entity, has announced the grand opening of a new extreme ultraviolet (EUV) lithography R&D center in New York state.
The R&D center, called the CHIPS for America Extreme Ultraviolet (EUV) Accelerator (EUV Accelerator), was officially announced last year. The EUV Accelerator, which is in operation now, will focus on advancing EUV lithography, a technology that is essential for manufacturing chips at the 5nm node and beyond.
As reported, the EUV Accelerator is operated by Natcast, a non-profit entity created through the CHIPS and Science Act. Natcast also operates the National Semiconductor Technology Center (NSTC), which is a public-private consortium dedicated to semiconductor research and development in the U.S.
The EUV Accelerator is located at the Albany NanoTech Complex in Albany, N.Y. Formed in 1997, the Albany NanoTech Complex is a large R&D center. Today, the 1.65-million-square-foot R&D center boasts more than $20 billion in high-tech investments with approximately 3,000 R&D jobs on site.
At the complex, researchers are currently developing next-generation logic processes, EUV lithography and other technologies. Several companies conduct various R&D activities at the site, including IBM, Applied Materials and TEL.
The New York Center for Research, Economic Advancement, Technology, Engineering and Science (NY CREATES), a non-profit organization, manages and operates the Albany Nanotech Complex.
Now, Albany Nanotech is the official home of the EUV Accelerator. The lithography R&D center will enable researchers from Natcast, NSTC member organizations, and NY CREATES to work on current and future EUV technologies. Key capabilities at the EUV Accelerator include:
*Access to EUV lithography tools and next-generation R&D capabilities, including a high-numerical aperture (NA) EUV system, with standard NA EUV tools currently available and a high-NA EUV tool expected in 2026.
*Collaboration space and resources for industry, academic, and government partners to advance technological innovation.
*Dedicated onsite Natcast offices and staff to support Natcast and NSTC member researchers.
*Support for programs that provide, foster, and grow a talented workforce.
*Facilitation of broad NSTC member engagement by fostering an open, collaborative R&D environment within the EUV Accelerator and across all NSTC facilities.
“The grand opening of the EUV Accelerator marks a momentous milestone for Natcast, the NSTC, and the entire U.S. semiconductor ecosystem, as this state-of-the-art facility underscores our commitment to developing and advancing next-generation semiconductor technologies here in the U.S.,” said Deirdre Hanford, Natcast’s chief executive.
Natcast is currently accepting project proposals for the EUV Accelerator. For questions, reach out to EUV@natcast.org